Category: Uncategorized
-
MEMS heater
Let’s take a look at a simple ohmic heater as might appear in a MEMS flow-sensor. An example is the FLS122 (FLUSSO, Cambridge, U.K.) which is a MEMS air velocity sensor in a surface mount package. The FLUSSO website states that the heater is based on a lithographically patterned tungsten wire. Either side of the…